Step 0. (Zero layer photo and etching)
Step 6. (N-Well Cover
Oxidation)
Step 10. (Pad
Oxidation/Nitride Deposition)
Step 13. (P-Well Field
Implant Photo)
Step 14. (P-Well Field Ion
Implant)
Step 15. (N-Well Field
Implant Photo)
Step 16. (N-Well Field Ion
Implant)
Step 20. (N-Channel
Punchthrough and Threshold Adjustment Photo)
Step 21. (N-Channel Punchthrough and Threshold Adjustment
Implant. Include NCH)
Step 22. (P-Channel Punchthrough
and Threshold Adjustment Photo: Mask PVT)
Step 23. (P-Channel Punchthrough
and Threshold Adjustment Implant. Include PCH)
Step 24. (Gate Oxidation/Poly-Si
Deposition)
Step 26. (Etch poly-Si in
lam4)
Step 27.
(Reoxidation and Capacitor Formation: no capacitor is requested, skip
step 30.)
Step 35. (PSG Deposition and
Densification)
Step 37. (Contact Plasma
Etch)
Step 41. (Plasma Etch
Al/2%Si)