Run Card for cmos150

 

Step 42.0

 

 

 

 

 

Process:  Sintering:  400C for 20min in forming gas

Date

Operator

 

 

 

 

1.

No ramping, use VSINT400 recipe in tylan13.

May 3, 2002

vorosl

 

 Note: Wafer #8 accidentally was broken.