Run Card for cmos150

 

Step 14.0

 

 

 

 

 

Process:   P-Well Field Ion Implant

Date

Operator

 

 

 

 

 

Note:  This step is processed in the Implant Center.

11/02/01

vorosl,

jcpeng

 

 

 

 

 

Specifications:

 

 

 

 

 

 

 

B11   Na = 1.5 x 1013  /cm2  

 

 

 

Energy = 70 KeV

 

 

 

Include PCH

 

 

 

 

 

 

 

Beam Limit

Flood

Req. wheels

Lot#

Offset Angle

No

No

No

CMOS150

0