Run Card for cmos150

 

 

Step 8.0

 

 

 

 

 

 

Process:   P-Well Implant

 

Date

Operator

 

 

 

 

 

 

Note: This step is processed outside in the Implant Center.

 

29/08/01

vorosl

 

 

 

 

 

 

Specifications:

 

 

 

 

 

 

 

 

 

B11    Nd = 3 x 1012  /cm2  

 

 

 

 

Energy = 80 KeV

 

 

 

 

Include NCH

 

 

 

 

 

 

 

 

 

Beam Limit

Flood

Req. wheels

Lot#

Offset Angle

No

No

No

CMOS150

0