Run Card for cmos150

 

Step 34.0

 

 

 

 

 

Process:  P+ S/D Implant: 

Date

Operator

 

 

 

 

 

Note:  This step is accomplished in the Implant Center.

February of 26th, 2002

vorosl

 

 B11, 20 KeV, 5e15/cm2, include PCH!

 

 

 

 

 

 

 

Note: Service request from Innovion (was called as Implant Center). Quotation ~$450. FedEx tracking #:

Arrived on 03/04/02.