Run Card for cmos150

Step 21.0

Process: N-Channel Punchthrough and Threshold Adjustment Implant

Date

Operator

Note: This step is processed in the Implant Center.

12/11/01

vorosl

Specifications:

B11 N_a = 8 x 10¹¹ /cm²

Energy = 120 KeV

B11 N_a = 1.9 x 10¹² /cm²

Energy = 30 KeV

Beam Limit	Flood	Req. wheels	Lot#	Offset Angle
No	No	No	CMOS150	0