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About
CMOS Baseline
General Baseline Information
Introduction
NanoLab Memoranda
Baseline Engineers
Baseline Reports
Report VIII: 0.35 um CMOS Process on Six-Inch Wafers The First Baseline Run in the New Marvell NanoLab by A. Szucs
Report VII: 0.35 um CMOS Process on Six-Inch Wafers by L. Petho
Report VI: 0.35 um CMOS Process on Six-Inch Wafers by L. Petho & A. Pongracz
Report V: 0.35 um CMOS Process on Six-Inch Wafers by A. Pongracz & G. Vida
Report IV: 0.35 um CMOS Process on Six-Inch Wafers by A. Horvath, S. Parsa, H.Y. Wong (pdf)
Report III: Six-Inch CMOS Baseline Process by L. Voros, S. Parsa (pdf)
Report II: CMOS Baseline Process by L. Voros (pdf)
Report I: CMOS Baseline Process by S. Fang (pdf)
Four-Inch Runs
CMOS 61
:
NVt,
PVt,
Resistivity
CMOS 60
:
NVt,
PVt,
Resistivity
CMOS 59
:
NVt,
PVt,
Resistivity
CMOS 58
:
NVt,
PVt,
Resistivity
Six-Inch Runs
CMOS 190 (0.35 um)
CMOS 180 (0.35 um with Mix&Match and STI)
CMOS 170 (advanced 0.35 um)
CMOS 161 (0.35 um)
CMOS 150 (1.3 um)
Graphics
Baseline Process Cross-section (pdf)
Process Logs
CMOS 200 Process Log
CMOS 190 Process Log
CMOS 180 Process Log
CMOS 170 Process Log
07/31/25