Academic Lab Recharge Rates

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Effective June 25, 2026

Lab Use and Equipment Use Fees

 

FY 2027

Lab Access Fee/Month

$101.00/month

General Laboratory Rate Use/Hour

(Includes sinks, microscopes, probe stations)

General Lab Rate Max./Month

$63.60/hour

 

$1,900/month

Tier 1 Equipment Rate Use/Hour

(Simple metrology, cpd, wire bond)

Tier 1 Rate Max./Month

$31.80/hour

 

$450.00/month

Tier 2 Equipment Rate Use/Hour

(Advanced metrology, CVD, DRIE, contact litho, ebeam litho)

Tier 2 Rate Max./Month

Rate over Tier 2 cap

$67.20/hour

 

$2,000/month

$9.00/hour

Tier 3 Equipment Rate Use/Hour

(SEM, epi SiGe, DUV)

Tier 3 Rate Max./Month

Rate over Tier 3 cap

$76.80/hour

 

$2,000/month

$22.20/hour

Staff Services/Hour

$145.80/hour

Service Fee (Applies to Supplies and Materials)

11.0%

 


07/31/25