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Effective June 25, 2025
|
Lab Use and Equipment Use Fees |
|
|---|---|
|
FY 2026 |
|
|
Lab Access Fee/Month |
$101.00 |
|
General Laboratory Rate Use/Hour (Includes sinks, microscopes, probe stations) General Lab Rate Max/Month |
$60.60
$1,750 |
|
Tier 1 Equipment Rate Use/Hour (Simple metrology, cpd, wire bond) Tier 1 Max/Month |
$30.60
$400.00 |
|
Tier 2 Equipment Rate Use/Hour (Advanced metrology, CVD, DRIE, contact litho, ebeam litho) Tier 2 Max/Month Use Rate/Hour Over Max/Month |
$63.60
$1,850 $7.80/hour |
|
Tier 3 Equipment Rate Use/Hour (SEM, epi SiGe, DUV) Tier 3 Max/Month Use Rate/Hour Over Max/Month |
$73.20
$1,850 $21.60/hour |
|
Staff Services/Hour |
$129.00 |
07/31/25