MEMORANDA FROM THE UC BERKELEY MICROLAB
 
1. Berkeley CMOS Process Test Patterns, No. UCB/ERL M84/26 
 W. G. Oldham, A. R. Neureuther
 March/June 1984
 From EECS 290N,O
 Volume 1: Analog Test Pattern
  Yield Test Pattern
  Shortloop Test Pattern
 Volume 2: Process Test Pattern (E)
  Process Drop-In Test Pattern (A)
  Device Drop-In Test Pattern (B)
  Device Test Pattern (F)
 
2. Berkeley CMOS Process, A User Guide, No. UCB/ERL M84/84
 W. G. Oldham, A. R. Neureuther, Y. Sacham, and F. Dupois
  October 1984
 
3. Characterization of the Boron+ Planar Dopant Source -
 Moisture Enhanced Process, No. UCB/ERL M86/75
 R. Alley, P. K. Ko, and K. Voros
 September 1986
 
4. MOS Processes in the Microfabrication Laboratory,
 No. UCB/ERL M87/12
 Katalin Voros and Ping K. Ko
 March 1987
 
5. An Object-Oriented Database Design for Integrated Circuit Fabrication. 
 No. UCB/ERL M87/43 
 Lawrence A. Rowe and Christopher B. Williams. 
 20 May 1987
 
6. Shop Floor Scheduling of Semiconductor Wafer Manufacturing,
 Mauricio Resende, PhD Thesis, 1987
 
7. MOSTCAP - An MOS Transistor Characterization and Analysis Program, 
 Gary S. May, MS Report, December 1987.
 
8. Berkeley Fabrication Facility Monitoring System, 
 Amit Sharma, MS Report, April 1988
 
9. EECS 143 Processing and Design of Integrated Circuits
 Laboratory Project, No. UCB/ERL M88/50
 Ping K. Ko, Robin R. Rudell, Katalin Voros
 August 1988
 
10. Tuning a Statistical Process Simulator to a Berkeley
 CMOS Process, No. UCB/ERL M88/82
 Paul M. Krueger
 December 1988
 
11. FLIP: A Graphic User Interface For Management and Utilization
 of Facilities, No. UCB/ERL M89/39
 Alex C. West
 April 1989
 
12. Evolution of the Microfabrication Facility at Berkeley,
 No. UCB/ERL M89/109 
 Katalin Voros, Ping K. Ko
 September 1989
 
13. A Tool For Collection of I-V Statistics Using HP 4062
 Semiconductor Parametric Test System, No. UCB/ERL M90/7
 Chia-Ray Ni
 January 1990
 
14. Process-Flow Specification and Dynamic Run Modification for Semi-
 conductor Manufacturing, No. UCB/ERL M91/40,
 Christopher J. Hegarty
 April 1991
 
15. FAULTS: An Equipment Maintenance And Repair Tracking System 
 Using a Relational Database, No. UCB/ERL M91/44
 David. C. Mudie
 May 1991
 
16. Electrical Testing of a CMOS Baseline Process, No. UCB/ERL M94/63
 David Rodriguez
 August 1994 
 
17. BCIMS: The Berkeley Computer Integrated manufacturing System,
 No. UCB/ERL M95/46
 L. J. Massa-Lochridge
 June 1995
 
18. CMOS Baseline Process In The UC Berkeley Microfabrication
 Laboratory, No. UCB/ERL M95/98
 Shenqing Fang
 December 1995
 
19. Etching For Micromachining Processing, No. UCB/ERL M96/37
 Kirt R. Williams, Richard S. Muller
 June 1996
 
20. CMOS Baseline Process In The UC Berkeley Microfabrication 
 Laboratory Report II, No. UCB/ERL M0061
 Laszlo Voros
 December 2000
 
21. Six-Inch CMOS Baseline Process In The UC Berkeley 
 Microfabrication Laboratory, No. UCB/ERL M02/39
 L. Voros and S. Parsa
 December 2002 
 
22. RUMS, Resource Utilization System, Memorandum No. UCB/ERL 03/43
 T. Duncan, T.K. Chen, D. Pestal and T. Merport
 November 2003
 
23. 0.35 um CMOS Process on Six-Inch Wafers, Baseline Report IV
 No. UCB/ERL M05/15
 A. Horvath, S. Parsa, H.Y. Wong
 April 2005