General Overview

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Equipment Manual

1.  General Information
1.1  (chp) Chemical Hygiene Plan
1.2   NanoLab Orientation Videos
1.3   How to Qualify on Equipment
1.4   Materials Control and Compatibility
1.5   NanoLab Tool Substrate Compatibility (4" / 6" / 8")
1.6   Chemical/Labware Guidelines
1.7   How to Make a Reservation
1.8   How to be a Lab Buddy
1.9   How to Write a Lab Manual

Process Manual

1.  General Information
1.1   Archived Process Manuals
1.2   How to Write a Process Manual
1.3   Blue & Gold Show Wafer Process
1.4   How to give a Nanolab orientation tour
1.5   Baseline CMOS Process
1.6   Processing of Glass Substrates
1.7   Stocked Tweezers
1.8   Stocked Beakers
1.9   Stocked Wafers
1.10   Administrative Quick Reference Guide
1.11   Tips and Tricks when Working with Small Samples
1.12   Chemical/Labware Guidelines
1.13   NanoLab Supplemental Process Data

Process Specifications

1.  General Information


07/31/25