Participants

UGIM2016 Presentation: The NanoLab High School Intern Program

 

Participant

Project Title

2017

Sarah (Sally) Robson,

Berkeley High School, Berkeley, CA

AZ4620 Thick Photoresist Lithography and Etching Process

Kyla Dangerfield,

Berkeley High School, Berkeley, CA

Si02 Recipe for Oxford PECVD3

Violet Buxton-Walsh,

Berkeley High School, Berkeley, CA

Developing a Mobile Electrostatic Chuck (MESC) 

 

 

2016

Julia Schwartz,

Berkeley High School, Berkeley, CA

SiC on Oxford PECVD 4

Sophie Phillips,

Berkeley High School, Berkeley, CA

Adding the Safety Infraction page to MercuryWeb

Renee Revolorio Keith,

Berkeley High School, Berkeley, CA

Characterizing LiftOff Process Latititude at the UC Berkeley NanoLab

Alam Figueroa Aguilar,

2016 Transfer to Excellence Research Program

Optimization of UV Stabilization Processes for Critical Dry Etch Applications

2015

Rachel Barcklay,

Berkeley High School, Berkeley, CA

Calculating Specialty Materials Usage Accurately: an Improved Algorithm and a Regression Series Mapping Voltage to Flow Rates

Francesca Calderon,

Miramonte High School, Orinda, CA

Critical Dimension Enhancement of DUV Photolithography on the ASML 5500/300

Irving Garduno,

2015 Transfer to Excellence Research Program

Optimization of Patterned Thin Films of  Photoresist for Plasma Etching Applications

Anjali Walia,

Irvington High School, Fremont, CA

Optical Emission Analysis of CF4/CHF3/Ar Plasma Etch of Oxide

Anushka Walia,

Irvington High School, Fremont, CA

Optical Emission Analysis of BCl3/Cl2 Plasma Etch of W, Al, and Ti Thin Films

Intern Pictures

2014

Nishtha Bhatia,

Washigton High School, Fremont, CA

i-Line Photoresist Development at the Marvell Nanofabrication Laboratory: Validation of New Standard i-Line Photoresist OiR 906-12

Kevin Crabbe,

2014 Transfer to Excellence Research Program

Investigation of a Spin-on Dielectric as an Interlayer Dielectric for the Marvell Nanofabricaiton Laboratory CMOS210

Samantha Wong,

Lowell High School, San Francisco, CA

SiO2 Characterization

2013

Anjali Majumdar,

Miramonte High School, Orinda, CA

UV26-3.0 Thick Positive DUV Photoresist

Katie Neff,

Castro Valley High School, Castro Valley, CA

Use of Cross-Platform Metrology Techniques to Investigate the Marvell Nanofabrication Laboratory Etch Quality Monitoring Program

Nova Ng,

Saratoga High School, Saratoga, CA

Front and back-end development of a new website for one of the recharge centers

2012

Ruby Spring,

Berkeley High School, Berkeley, CA 

tystar5 characterization

Wen Ye Wendy Li,

Albany High School, Albany, CA

Qualify CHA metal deposition through measuring contact resistance, sheet resistance and reflectance. 2.Create test wafers for measuring the contact resistance of certain metals deposited by the CHA

Taylor Lyberger,

Palos Verdes Peninsula High School

Test Axcelis UV-Oven Check 4 types of photoresist Std. I-line, Std. G-line, DUV, Thick PR On Si, Ox, Al, Poly wafers

2011

Marie Lu,

Campolindo High School, CA

Oxford2 Silicon Nitride Recipe Development

Kate Obrien,

Talmapais High School, CA

Surface modification using organic single atomic monolayers

2009

Anjana Bala,

Mission San Jose High School, CA

Characterizing Aluminum Uniformity Using Resistance

Sarah Ip,

Mills High School, CA

Comparison of Thin-Film Aluminum Deposition

Christopher McNally,

Diablo Valley College, CA

Taurus and Hydra Systems 

2008

Kelsey Brokaw Oslo,

International School, Norway

Chemical mechanical polishing process development

Alice Wong,

College Preparatory School, Oakland, CA

Via Fill in Small Trenches using Hot Aluminum Process

2007

Carolyn Kooi,

College Preparatory School, Oakland, CA

Uniformity Characterization of Technics-c

Emmeline Lan,

Irvington High School, Fremont, CA

CPA: Al Thickness vs. Sheet Resistance

2006

Sonia Ganju,

Notre-Dame High School, Belmont, CA

 

Wafer Resistance Uniformity Tests For Edwards Sputtering System

Andrea Imhof,

University High School, San Francisco, CA

2005

Subha Gollakota,

Harker High School, San Jose, CA

Microlab Website

2003

Bonny McKeon,

Bishop High School, Bishop, CA

Characterization of Boron Diffusion from Boron+Source Wafers

2001

Chi Sum (Crystal) Chan,

Washington High School, San Francisco, CA

Erin Hsu,

Thurgood Marshall High School, San Francisco, CA

Brianne Madison,

Vallejo High School, Vallejo, CA


03/23/18