We provide an extensive array of metrology tools for thorough device characterization. Our analytical capabilities include electrical characterization, surface topography analysis (with atomic force microscopy - AFM), film thickness and optical property measurements, structural and compositional analysis, a range of high resolution optical microscopes, and scanning electron microscopy (SEM).
Equipment Manual
8. Testing & Inspection Equipment
Electrical Measurements
8.1 (cde-resmap) CDE ResMap Four Point Probe (automated mapper 2" -12")
8.2 (probe-eb8) Everbeing EB-8 Analytical Probe Station
8.3 (sca) Surface Charge Analyzer
Topography
8.10 (afmclass) Atomic Force Microscopy Class
8.11 (park-afm) Park Systems Atomic Force Microscope
8.12 (alphastep) KLA-Tencor Alpha-Step D-600 Profilometer
8.13 (dektak) Dektak 3030 Surface Profiler
8.14 (wyko) Wyko NT3300 Profiling System
Film Thickness and Index
8.20 (ellips) Gaetner Stokes Ellipsometer
8.21 (ellips2) Angstrom Sun Spectroscopic Ellipsometer
8.22 (metricon) Thin Film Thickness/Refractive Index Measurement System
8.24 (nanospec) NanoSpec Film Thickness Measurement System
8.25 (nanospec-cmp) Nanospec/AFT Thin Film Measurement System
8.26 (msp300) Angstrom Sun MSP300 Microspectrophotometer
Structure and Composition
8.31 (flexus) Flexus Thin Film Stress Measurement
8.32 (ftir) Fourier Transform IR Spectrometer
8.33 (raman-scope) BaySpec Raman Spectrometer
8.34 (uvvis) UV-VIS Spectrophotometer
8.35 (xdif) Siemens D5000 X-Ray Diffractometer
8.36 (wafergauge) E+H Wafer Geometry Gauge
Surface Properties
8.40 (kruss) Contact Angle Measurement System
8.41 (tensiometer) Tensiometer (KSV Sigma 701)
IR Microscopy and Imaging
8.50 (ircam) IR Inspection Camera
8.51 (irscope) IR Microscope
Optical Microscopy and Imaging
8.60 Optical Microscopes
8.61 (keyence) Keyence VHX-500 Digital Microscope
8.62 (keyence7000) Keyence VHX-7000 Digital Microscope
8.63 (linewidth) Linewidth Measuring System
8.64 (linewidth2) Linewidth2 Zeiss Axioplan2 Measuring System
8.65 (olympus) Olympus LEXT OLS4000 3D Laser Confocal Microscope
8.66 (reichert) Reichert Microscope
UV Microscopy and Imaging
8.70 (uvscope) Leica INM100 Microscope
E-Beam Microscopy and Imaging
8.80 (semclass) Scanning Electron Microscopy Class
8.81 (zeiss-sem) Zeiss Scanning Electron Microscope
8.82 (zeiss-sem2) Zeiss 200 mm Scanning Electron Microscope
8.83 (fei-sem) FEI Nova NanoSEM 650 Scanning Electron Microscope
Process Manual
8. Testing and Inspection
8.2 (ellips2) Spectroscopic Ellipsometer Model Analysis
8.3 (ftir) Introduction to FT/IR Measurements
8.5 (msp300) Multi-layer Thin Film Color Calculator
Process Specifications
8. Testing & Inspection Equipment
8.3.1 (cde-resmap) CDE ResMap 4.42 Ohm-cm Resistivity
8.3.2 (cde-resmap) CDE ResMap 0.0380 Ohm-cm Resistivity
8.5.1 (sca) SCA 2.87E14 cm-3 Nsc
8.11.1 (park-afm) Park AFM Noise Floor Measurement
8.20.1 (ellips) Ellips 1054 A SiO2 Thin Film
8.20.2 (ellips) Ellips 4455 A Si3N4 Thin Film
8.23.1 (nanoduv) Nanoduv 1054 A SiO2 Thin Film
8.23.2 (nanoduv) Nanoduv 4455 A Si3N4 Thin Film
8.24.1 (nanospec) Nanospec 1054 A SiO2 Thin Film
8.24.2 (nanospec) Nanospec 4455 A Si3N4 Thin Film
8.26 (msp300) MSP300 Oxide / Nitride thin film
8.60.1 (keyence) Keyence 20 um Pitch (500x)
8.60.2 (keyence) Keyence 5 um Pitch (1000x)
8.62 (keyence7000) Keyence 7000 10um pitch
8.63.1 (olympus) Olympus 1.8 um Step
8.63.2 (olympus) Olympus 12 um Pitch