In House Mask-Making Services

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NanoLab offers in-house mask-making services with a quick turnaround and competitive pricing. We can provide 5”, 6”, or 7” masks with a minimum resolution of 600nm.

Equipment Manual

3.  Mask Making
3.1   General Mask Making
3.4  (gcapg) GCA 3600 Pattern Generator
3.6  (aptchrome) APT Chrome Mask Process

Process Manual

3.  Mask Making
3.1   Mask Request Quick Steps
3.2  (asml300) ASML Reticle Design Guide
3.3  (gcaws6) GCAWS6 Reticle Design Guide
3.4   Iron Oxide Mask Processing

Process Specifications

3.  Mask Making


07/31/25