Microlab's last tool moved to NanoLab!
May 27, 2011
NanoLab Members,
The last tool, centura, was moved from Cory Hall this week.
The equipment move from Cory Hall is complete!
We now focus on the establishment of stable and steadily improving operations.
My goal is NOT to just move an impressive collection of complex research equipment,
but also transfer, preserve and enhance a unique culture of cooperation and creativity.
Your careful attention to all policies & procedures, and respect & support of each other's work are critical to our success.
I look forward to reviewing a clean and well-cared for laboratory after the long weekend.
– Bill Flounders, Operations and Technology Manager


Microlab's MEMS-Exchange Network support continues in the Marvell NanoLab
May 20, 2010
Last week the Marvell NanoLab completed its first MEMS-Exchange process run – an MOS-clean silicon thermal oxidation. MEMS-Exchange, now MEMS and Nanotechnology Exchange , provides nationwide micro- and nanotechnology foundry and consulting services. Foundry work is provided via a virtual fab, utilizing the diverse fabrication resources of private research labs, specialized foundries, government facilities, and leading academic research institutions. The UC Berkeley Microlab processed its first MEMS-Exchange run in November 1998, and has been an active member of the virtual fab ever since. During just the past five years, the Microlab has completed a total of 291 process runs, some with as many as 50 steps. The Marvell NanoLab will continue support of MEMS-Exchange, delivering a wide range of process modules to this national nanotechnology-development resource.
– Sia Parsa, Process Engineering Manager

CMOS-Quality Gate Oxides Verify Integrity of NanoLab Utility Systems and Furnaces

March 8, 2010
Two Tystar oxidation furnaces were qualified and released for lab-member use last week. The qualification tests not only demonstrate furnace performance, but also verify excellent contamination control in a number of lab systems. CMOS-quality gate oxides were grown with a silicon-silicon dioxide interface charge density in the low 10 e10/cm2 level, as required for most microelectronic devices. Contamination control to this level also demonstrates the cleanliness of the new Wafab wet-process stations used for pre-furnace cleans, and validates the integrity of the lab-wide oxygen, nitrogen, and deionized water systems.
 – Sia Parsa, NanoLab Process Manager
Combined Lab Orientation for New Members
January 22, 2010
The Microlab held its first combined orientation class with the NanoLab last week. This class qualified 20 researchers to work in both the Cory Hall Microlab and the Sutardja Dai Hall Marvell NanoLab. All future new-member orientations will provide this dual-laboratory introduction and safety training. Current Microlab members who need access to a tool that has already moved to the Marvell Lab can take the NanoLab-only orientation .

NanoLab Qualification Completed by 1/3 of Active Microlab Members
December 21, 2009
Since October, more than 1/3 of currently active Microlab members have become qualified to work in the NanoLab by taking the Marvell NanoLab Safety Orientation class. NanoLab qualification of all active Microlab members is anticipated by April 1. Next month, the general Marvell Lab Orientation will become an additional component of the regular Microlab Orientation . Tool-specific Marvell Lab orientations will continue throughout the new year.

LEO Online with Improved Performance
December 18, 2009
Though Zeiss servicing took longer than expected, the Leo electron microscope upgrade is complete. LEO and Hummer, its associated sample-coating sputter tool, have been released for general use in the Marvell Lab. LEO performance has improved significantly, and the new dial controls for image adjustment are more convenient.

Lam7 and Tystar Moves Scheduled for January
December 07, 2009
Lam7 (the Lam5 replacement, left) is targeted for release the week of December 14. This is a new system, and baseline characterization will be required prior to general use.

The Tystar furnaces (right) are being phased in next month. Bank 1 is targeted for the week of January 11, Banks 4 and 5 by the end of January, and Bank 3 soon after.
LEO SEM Move and Upgrade Completed
December 07, 2009
The LEO SEM was successfully moved to the Marvell NanoLab, and is expected to be ready for labmember use by Thursday, December 10. As part of the move, Zeiss field service performed an extensive hardware and software upgrade that includes new control electronics for scan, video matrix, and optical functions. The upgrade includes new scan and optic coils that replace the current column windings. Tip and apertures have also been replaced and an upgraded secondary electron detector installed. Significant improvement in LEO performance and reliability is expected.
Marvell NanoLab Open for Research
October 26, 2009
On Monday October 26, 2009, the Marvell Nanofabrication Laboratory officially opened for labmember research! The Crestec ebeam writer has been started up, qualified and released for lab member use. Crestec is available for reservations through the recently released MercuryWeb software. Marvell NanoLab Orientation Classes are underway. This orientation covers basic safety requirements and laboratory information; members must complete the class before entering the laboratory. At this time, registration announcements are being sent only to members qualified on tools already moved or about to move into the Marvell NanoLab.
 — Bill Flounders, Manager, Marvell NanoLab

Lab Telephone System—Installed and Ready
September 11, 2009
The Marvell Laboratory purchased a separate phone system to handle the more than 50 phone lines which serve the laboratory portion of the building. This system is independent of the campus phone system and saves the laboratory significant recurring monthly campus phone charges. The investment will pay for itself in less than two years. Phone installation is complete and new lab phone numbers will be posted September 14. Most Microlab employees will remain in Cory Hall for several more months but some staff can now relocate into the new lab office space.
 — Phill Guillory, NanoLab Projects Manager

Mercury v1.0—The New Wave of the Wand
August 24, 2009
Mercury v1.0, our custom lab database system that is the successor to the Microlab's Wand software, was released last week for use in the NanoLab. Designed utilizing 25 years of Microlab operations experience, Mercury will provide researchers and staff with powerful GUI tools to insert and analyze operational data. The Microlab will continue to use the existing Wand.

— Todd Merport, NanoLab Computer Systems Manager   

New Heatpulse RTP Tool
August 14, 2009
The Marvell Nanolab obtained its first 200mm-capable thermal processing tool, which will enable uninterrupted RTP access while the Microlab's Heatpulse systems are deinstalled and moved. This benchtop tool was built by AllWin21 , the exclusive licensee of Heatpulse RTP designs.
First Tool Move to be Crestec Lithography
August 7, 2009
The first tool to be relocated from the old to the new lab will be the Crestec ebeam lithography system. Lab researchers will receive at least four weeks notice prior to tool shutdown and movement. Crestec engineers will support this move to ensure a smooth and rapid restart.


Lam1 is Retired
August 7, 2009
The first tool was decommissioned from the Microlab last week, though it will not be moved to the new lab. Lam1, an Autoetch490 that was originally Lam Tool Serial #003 and has served the Microlab since 1984, was officially retired. This tool was sold to an equipment manufacturer as a development tool for after-market Lam control-panel upgrades.

New Wet-Processing Sinks Arrive
July 31, 2009
During July, we received our first batch of new sinks from WAFAB International . Though some of the existing lab sinks will move, the new sinks provide redundancy for critical wet processing, and ensure uninterrupted access to research processes such as manual-resist spinning and resist stripping.


Epitaxial Silicon-Germanium System Received — Thank You Applied Materials
July 31, 2009

Thanks to Applied Materials for the major donation of an epitaxial silicon-germanium deposition system. Though complete installation will take several months, utility preparation is already underway.



Cleanroom Certification for Marvell NanoLab
June 1, 2009
The Marvell NanoLab passed the particle count certification - with flying colors. Class 100 area certified with 0-12 particles > = 0.3 micrometer diameter (avg ~ 5 particles). Class 1000 area certified with 10-350 particles > = 0.3 micrometer diameter (avg ~ 120 particles). With this final contractor requirement complete, the Marvell Lab transition team can now modify utility systems to enable equipment connections. It's time to generate some dust in our new clean room!
Sutardja Dai Hall Fire Alarm System Approved
May 27, 2009
The campus Fire Marshall signed off on the new building fire-alarm system and the building went live at 5:24pm today. Because the fire-alarm panel is now monitored by UC Police, the building can be opened to the public and building occupancy can begin. Most important for us, the Marvell Lab transition team can now prepare the lab to receive equipment.
A. Richard Newton Bridge Dedicated
May 18, 2009
The suspended pedestrian bridge between the new Sutardja Dai Hall and Cory Hall was dedicated to the memory of former Dean A. Richard Newton. The stairway below the bridge is once again open, allowing access to campus between Cory and Sutardja Dai Halls from the Hearst Street near LeRoy. Photos and video of the bridge installation.

Marvell NanoLab in the News
May 5, 2009
Marvell Technology Group Founder and Vice President Weili Dai held a publicity briefing at Sutardja-Dai Hall for several news organizations today, with articles by VentureBeat . We're not in the new lab yet - but we are already in the news!
N2 Supply Project Completed for Cory, Hearst Mining, and Marvell Lab
April 24, 2009
A new set of high-capacity liquid nitrogen vaporizers were installed at Cory Hall this month. These systems convert bulk liquid nitrogen (LN2) to gaseous nitrogen (N2) for Cory Hall, the Hearst Mining Building and the new Marvell NanoLab. The work was completed without interrupting N2 service to the building laboratories. This installation adds flexibility and reliability to the N2 supply system and remediates a long-standing issue with undersized vaporizer capacity.
First Tool Delivered to New Lab - Thank You LAM Research
April 24, 2009
The first tool for the Marvell NanoLab was delivered today and accepted at the new building shipping and receiving. The tool is a metal plasma etcher donated by Lam Research Corporation . The complex delivery of this large piece of equipment went without a hitch.


Sutardja Dai Hall and CITRIS Dedication
February 27, 2009
Marvell Lab Director Dr. William Flounders (left) and Former California Governor Gray Davis suit up to tour the clean rooms in the new Marvell Nanofabrication Lab facilities. Gov. Davis was responsible for the funds that enabled construction of the new laboratory and CITRIS - one of four California Institutes of Science and Innovation .

CITRIS Dedication story and pictures
CITRIS dedication speeches and ribbon cutting (You Tube videos)




08/10/16