Short loops of the FlexFET process

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Short loop #1. Silicon : Silicon-nitride selectivity at the Si etch (bottom gate) step (step 38)

Short loop #2a. PSG drive out test (step 28)

Short loop #2b. Determine PSG, BSG out diffusion characteristics (steps 28, 35)

Short loop #3. Nitride/PSG spacer formation and spacer removal study (steps 24, 42)

Short loop #4. Ti top gate etch (step 54a)

Short loop #5. Gate contact etch (step 61)

Short loop #6. Ti (dry-wet) etch under nitride (LTO) hard mask, on Si (step 21a)

Short loop #7. TiSi2 formation under nitride (LTO) film (step 16)

Short loop #8. Indium P-bottom gate/Vt adjustment implant test (step 44)