Step 22. Resist strip and clean
|
Steps |
Notes |
Date |
Operator |
|
22.1 |
Resist strip and clean on implanted
S/D wafers was done and described in step 20a.2 |
03/12/04 |
Horvath |
|
22.2 |
Resist strip and clean on Silicided S/D wafers was done and described in step 20b.1 |
04/02/04 |
Horvath |