Step 65. Aluminum etch
|
Steps |
Notes |
Date |
Operator |
|
65.1 |
2 steps etch: -
BARC etch in Centura: MXP_BARC_ETCH, 40 sec (approx. 800-900A UV210 PR
is etched) -
Al etch in Lam3:
Monitoring recipe (no overetch): a) Silicided wafers: 65 sec etch time b) Implanted wafers: 75 sec etch time |
08/11/04 |
Horvath |