Step 46. Gate oxidation
|
Steps |
Notes |
Date |
Operator |
|
46.1 |
TCA clean Tystar1 tube
overnight Tystar1, 1FLXGATE recipe, 900C,
4 min oxidation, 10 min N2 annealing at 900C Oxide thickness: 51A on
dummy (Sopra ellipsometer) |
6/14/04 |
Horvath |