Step 44. Nitride spacer etch
|
Steps |
Notes |
Date |
Operator |
|
44.1 |
Centura, MXP_NITSP_ETCH recipe Stop the etching before
the endpoint shows up to prevent wafers from overetch. Etch times: 18-20 sec. Wafers look clean and free
of nitride residue under SEM. |
6/10/04 |
Horvath |