Step 42. Sacrificial oxidation
|
Steps |
Notes |
Date |
Operator |
|
42.1 |
Sacrificial oxide target:
70A Tystar1, 1FLXGATE recipe,
850C, 30 min, no N2 annealing Oxide thickness on dummy:
81A (Sopra ellipsometer) |
6/4/04 |
Horvath |