Step 38. Strip BSG and PSG
|
Steps |
Notes |
Date |
Operator |
|
38.1 |
-
Implanted S/D
group: 1.) NMOS wafers: #13, 14: remove PSG in 5/1 BHF: 25 sec
[~2700A/min] 2.) CMOS wafers: #3, 7: remove BSG in 5/1 BHF: 35 sec [~1500A/min] -
Silicided S/D group: 1.) NMOS wafers: #2, 12: remove PSG in 10/1 BHF: 25 sec
[~1500A/min] 2.) CMOS wafers: #5, 6, 9, 10: remove BSG in 10/1 BHF:
30 sec [~1000A/min] |
05/20/04 |
Horvath |