Step 37. RTA PSG and NMOS drive
|
Steps |
Notes |
Date |
Operator |
|
37.1 |
Heatpulse3, 1000C, 10sec,
N2 [ 450C, 20sec pre heat] Implanted S/D: #7, 3, 13,
14 Silicided S/D: #2, 12, 10, 9, 5, 6 |
05/19/04 |
Horvath |