Step 31. BSG spacer deposition
|
Steps |
Notes |
Date |
Operator |
|
31.1 |
-
30 sec 25/1 HF
dip implanted S/D wafers prior deposition (no HF dip for silicided
wafers) -
BSG
deposition: P-5000, 18 sec. dep. time -
BSG thickness
measurement (Nanospec): W#7:
1540A W#3:
1560A |
05/06/04 |
Horvath |