Step 30. Strip PSG
|
Steps |
Notes |
Date |
Operator |
|
30.1 |
CMOS wafers only. Sink8, fresh 5/1 BHF -
silicided S/D wafers: 14
sec etch time -
implanted S/D
wafers: 20 sec etch time SEM inspection: no glass
left. |
05/05/04 |
Horvath |