Step 21. RTA silicide reaction on Silicided
S/D wafers
|
Steps |
Notes |
Date |
Operator |
|
21.1 |
Silicided S/D wafers only: F# 2, 5, 6, 9, 10, 12. RTA silicidation
in Heatpulse3: - 600C, 60sec, Ar |
04/15/04 |
Horvath |