Step 10.0 N+ S/D implant
|
Steps |
Notes |
Date |
Operator |
|
10.1 |
Implanted S/D wafers only: F#1, 3, 7, 8, 11, 13, 14. + 1 blank test wafer Arsenic, 1E15, 40 KeV, 7
deg. Tilt Wafers were sent to Core Systems
on 12/05/03. Wafers are back on
12/09/03. |
12/05/03 |
Horvath |