Step 1.0 Starting wafers
|
Steps |
Notes |
Date |
Operator |
|
|
|
|
|
|
1.1 |
SIGMUI Low-dose SIMOX
<100> FZ, 1200-1300 ohm-cm, 1E13 Boron |
10/23/03 |
Horvath |
|
1.2 |
15 SOI wafers, 3 prime (<100> CZ,
40-60 ohm-cm, P-type, 2.5E14 Boron), control wafers 2 test (<100> EPI,
5-10 ohm-cm, N-type) control wafers |
10/23/03 |
Horvath |