Split point #2 Implanted S/D
vs. Silicided S/D
|
Steps |
Notes |
Date |
Operator |
|
|
|
|
|
|
|
Implanted S/D wafers: F#1,
3, 7, 8, 11, 13, 14 |
12/02/03 |
Horvath |
|
|
Silicided S/D wafers: F#2,
5, 6, 9, 10, 12, 15 |
12/02/03 |
Horvath |