Split Table for UCB FlexFET Lot
	CMOS Wafers				NMOS Wafers
	Implanted S/D		Silicide S/D		Implanted S/D		Silicide S/D
S/D     Thick	Poly Gate	TiN Gate	Poly Gate	TiN Gate	Poly Gate	TiN Gate	Poly Gate	TiN Gate
1425	x	3	5	6	x	x	12	x
1875	7*	x	9	10	13	14	x	2
						NOTE:  All Implants with NO TILT
Wafer	NMOS  /CMOS	IMPLANTED/SILICIDE  S/D	N+ POLY        /TiN  TOPGATE	S/D         Thick	Chan    Thick	PMOS   BottGate Implant #1 Phosphorus	PMOS   BottGate Implant #2            Antimony	PMOS   Threshold Implant                     BF2	NMOS  BottGate Implant #1            Boron	NMOS  BottGate Implant #2               Indium	NMOS Threshold    Implant
2	NMOS	SILICIDE	TiN	1850	1850	N/A	N/A	N/A	5e13, 40keV	1e14, 195keV	As, 5e12, 16keV
3	CMOS	IMPLANTED	TiN	1450	204	5e13, 100keV	1e14, 195keV	5e12, 16keV	5e13, 40keV	1e14, 195keV	As, 5e12, 16keV
5	CMOS	SILICIDE	N+ POLY	1415	1415	5e13, 100keV	1e14, 195keV	1e13, 16keV	5e13, 40keV	1e14, 195keV	BF2, 5e12, 16keV
6	CMOS	SILICIDE	TiN	1435	1435	5e13, 100keV	1e14, 195keV	5e12, 16keV	5e13, 40keV	1e14, 195keV	As, 5e12, 16keV
7	CMOS	IMPLANTED	Poly*	1890	314	5e13, 100keV	1e14, 195keV	5e12, 16keV	5e13, 40keV	1e14, 195keV	As, 5e12, 16keV
9	CMOS	SILICIDE	N+ POLY	1855	1855	5e13, 100keV	1e14, 195keV	1e13, 16keV	5e13, 40keV	1e14, 195keV	BF2, 5e12, 16keV
10	CMOS	SILICIDE	TiN	1725	1725	5e13, 100keV	1e14, 195keV	5e12, 16keV	5e13, 40keV	1e14, 195keV	As, 5e12, 16keV
12	NMOS	SILICIDE	N+ POLY	1420	1420	N/A	N/A	N/A	5e13, 40keV	1e14, 195keV	BF2, 5e12, 16keV
13	NMOS	IMPLANTED	N+ POLY	1895	372	N/A	N/A	N/A	5e13, 40keV	1e14, 195keV	BF2, 5e12, 16keV
14	NMOS	IMPLANTED	TiN	1865	366	N/A	N/A	N/A	5e13, 40keV	1e14, 195keV	As, 5e12, 16keV
* Split strategy change as of 6/14/2004