Step 27. PMOS Vt implant photo

Step	Process	Date	Comments	Operator
27.1 27.2 27.3 27.4 27.5 27.6	PR strip in Matrix, 2:30 Sink8 piranha clean SVGCoat6 1-2-1 ASML, NWELL mask, 22 mJ, -0.03 um (by FEM) SVGDev6 1-1-9 UVBake pr. J	5/23/2011		Szucs