Step 9. P-Well photo

 

 

 

 

Step

 

Process

Date

Operator

 

9.1

 

 

Std. DUV litho

ASML: mask PFIELD, 20mJ (w#5 had to be re-exposed)

Hard bake: Oven bake 1.5hr @ 120C

 

08/27/03

Horvath