Step 54.  Metal 2 deposition

 

 

 

 

Step

 

Process

Date

Operator

 

54.1

 

 

Remove PR in Matrix + 10sec Al etch in Lam3 STD. recipe

Al dep. in CPA: 6mT, 4kW, 22.5cm/min, 3 passes
Target: 9000A

Rs=0.12 Ohm/sq

03/30/05

Horvath