Step 47. Metal 1 photo

 

 

 

 

Step

 

Process

Date

Operator

 

47.1

 

 

Std. DUV litho with BARC

Mask: M1 on Basline1
Focus-energy matrix on test wafer.
21mJ, -0.35um

UVBAKE pr. U.

 

11/24/04

Horvath