Step 45.  Contact etch

Step	Process	Date	Operator
45.1	PSG Contact etch in Centura MxP: Recipe: MXP_OXSP_ETCH_EP Track endpoint signal. Manual endpoint after signal drop plus 15 sec overetch. Etching through BARC takes ~50-60 sec (signal changes) Overall etch time is 190-200 sec. Check R with manual probe on Poly and S/D area on each wafer. R ~ 10-100Ohm	11/21-22/04	Horvath