Step 39. N+ Gate and S/D implant

 

 

 

 

Step

 

Process

Date

Operator

 

39.1

 

 

Include NCH 

Note: Should include Tpoly2 (not prepared this time)

 P31, 3E15, 40KeV
 

 11/09/04
-
11/14/04

Core Systems