Step 33. N-type LDD implant

 

 

 

 

Step

 

Process

Date

Operator

 

33.1

 

 

Include NCH

 As, 5E13, 30KeV, +7 deg tilt @ 0 orientation
 
As, 5E13, 30KeV, +7 deg tilt @ 180 orientation


 10/25/04
-
10/29/04

Core Systems