Step 31. P-type LDD implant

 

 

 

 

Step

 

Process

Date

Operator

 

31.1

 

 


 BF2, 5E13, 10KeV, +7 deg tilt @ 0 orientation
 BF2, 5E13, 10KeV, +7 deg tilt @ 180 orientation

 

sent on 10/19/04

Core Systems