Step 26. NMOS
Vt adjustment
implant
|
Step |
Process |
Date |
Operator |
|
26.1 |
W# 1, 2, 3, 4, 5, PCH: Phosphorus, 2E12, 30KeV W# 6, 7, 8, 9, 10: Phosphorus, 1E12, 30KeV |
09/17/04 |
Core
Systems |