Step 24. NMOS
Vt adjustment
implant
|
Step |
Process |
Date |
Operator |
|
24.1 |
W# 1, 2, 3, 9, 10, NCH: BF2, 4E12, 50KeV W# 4, 5, 6, 7, 8: BF2, 6E12, 50KeV |
09/10/04 |
Core
Systems |