| Process | Tool ID |
Move Status | Tool Down |
Online Target | Online Actual |
Room Number |
| Thermal | heatpulse1 | Micro-Up |
| | | 582 |
| Thermal | heatpulse2 | Micro-Up |
| | | 582 |
| Thermal | heatpulse3 | Micro-Up |
| | | 386 |
| Thermal | heatpulse4 | Micro-Up |
| | | 386 |
| Thermal | heatpulse8 | New Rcvd |
| | | 386 |
| Thermal | nanox | Micro-Up | |
| | 582 |
| Thermal | tylan5 | NA | |
| | NA |
| Thermal | tylan6 | NA | |
| | NA |
| Thermal | tylan7 | NA | |
| | NA |
| Thermal | tylan8 | TBD | |
| | NA |
| Thermal | tystar1 | Micro-Up | |
| | 386 |
| Thermal | tystar10 | Micro-Up |
| | | 386 |
| Thermal | tystar11 | Micro-Up |
| | | 386 |
| Thermal | tystar12 | Micro-Up |
| | | 386 |
| Thermal | tystar13 | Micro-Up |
| | | 386 |
| Thermal | tystar14 | Micro-Up |
| | | 386 |
| Thermal | tystar15 | Micro-Up |
| | | 386 |
| Thermal | tystar16 | Micro-Up |
| | | 386 |
| Thermal | tystar17 | Micro-Up |
| | | 386 |
| Thermal | tystar18 | Micro-Up |
| | | 386 |
| Thermal | tystar19 | Micro-Up |
| | | 386 |
| Thermal | tystar2 | Micro-Up | |
| | 386 |
| Thermal | tystar20 | Micro-Up |
| | | 386 |
| Thermal | tystar3 | Micro-Up | |
| | 386 |
| Thermal | tystar4 | Micro-Up | |
| | 386 |
| Thermal | tystar5 | NA | |
| | 386 |
| Thermal | tystar6 | NA | |
| | 386 |
| Thermal | tystar7 | NA | |
| | 386 |
| Thermal | tystar9 | Micro-Up | |
| | 386 |
| Thermal | vacoven | Micro-Up | |
| | 582A |
| Thermal | vacoven2 | New Rcvd |
| | | 582A |