Process	Tool ID	Move Status	Tool Down	Online Target	Online Actual	Room Number
Litho	aptchrome	Micro-Up				382A
Litho	aptemul	Micro-Up				382A
Litho	asml	Micro-Up				NA
Litho	asml300	NA				384
Litho	axcelis	New Rcvd
Litho	bakeoven	Micro-Up				382
Litho	canon	Micro-Up				382
Litho	crestec	Tool-Down	28-Sep-09	12-Oct-09		384
Litho	gcapg	Micro-Up	7-Dec-09	21-Dec-09		382A
Litho	gcaws2	Micro-Up				384
Litho	gcaws6	Micro-Up				384
Litho	jeol107	Micro-Up				NA
Litho	ksaligner	Micro-Up				382
Litho	maskcopy	Micro-Up				382A
Litho	primeoven	Micro-Up				382
Litho	quintel	Micro-Up				382
Litho	spinner1	Micro-Up
Litho	spinner2	NA				382
Litho	spinner3	NA
Litho	svgcoat1	Micro-Up				384
Litho	svgcoat2	Micro-Up				384
Litho	svgcoat3	Micro-Up				384
Litho	svgcoat6	Micro-Up				384
Litho	svgdev	Micro-Up				384
Litho	svgdev6	Micro-Up				384
Litho	telact12	New Rcvd				384
Litho	uvbake	Micro-Up				384