Process	Tool ID	Move Status	Tool Down	Online Target	Online Actual	Room Number
Etch	centura	Micro-Up				586/597
Etch	centura-met	Micro-Up				586/597
Etch	centura-mxp	Micro-Up				586/597
Etch	centura-stri	Micro-Up				586/597
Etch	hfvapor	Micro-Up				382
Etch	ionmill	Micro-Up				582
Etch	lam1	NA				NA
Etch	lam2	Micro-Up
Etch	lam3	TBD				584
Etch	lam4	Micro-Up				584
Etch	lam5	Micro-Up				584
Etch	lam6	New Rcvd				584
Etch	lam7	New Rcvd				584
Etch	lam8	NA				584
Etch	matrix	Micro-Up				384
Etch	oxford	Micro-Up				584
Etch	ptherm	Micro-Up				582
Etch	semi	Micro-Up				584
Etch	sts	Micro-Up				584
Etch	technics-c	Micro-Up				584
Etch	xetch	Micro-Up				584