| Process | Tool ID |
Move Status | Tool Down |
Online Target | Online Actual |
Cory Room # | MNL Room # |
| Clean | cpd |
Micro-Up | | | | 432B | 382 |
| Clean | cpd2 |
Micro-Up | | | | 432B | 382 |
| Clean | msink1 | Nano-Up | |
28-Sep-09 | | NA |
382 |
| Clean | msink10 | | | | |
| 382A |
| Clean | msink12 | | | | |
| 586 |
| Clean | msink14 | | | | |
| 586 |
| Clean | msink16 | New Rcvd | |
| | | 582A |
| Clean | msink18 | New Rcvd | |
| | | 582A |
| Clean | msink2 | | | | |
NA | 382 |
| Clean | msink3 | Nano-Up | |
28-Sep-09 | | NA |
382 |
| Clean | msink4 | | | | |
420 GL2 | 382 |
| Clean | msink5 | New Rcvd | |
| | | 382 |
| Clean | msink6 | New Rcvd | |
| | | 386 |
| Clean | msink7 | | | | |
| 386 |
| Clean | msink8 | New Rcvd | |
| | | 386 |
| Clean | sink3 |
Micro-Up | | | | 420 GL2 | NA |
| Clean | sink4 |
Micro-Up | | | | 420 Y1 | NA |
| Clean | sink432a |
Micro-Up | | | | 432A | NA |
| Clean | sink432c |
Micro-Up | | | | 432C | NA |
| Clean | sink5 |
Micro-Up | | | | 420 Y2 | NA |
| Clean | sink6 |
Micro-Up | | | | 420 VLSI1 | NA |
| Clean | sink7 |
Micro-Up | | | | 420 VLSI2 | NA |
| Clean | sink8 | Micro-Up | |
| | 420 VLSI2 | |
| Clean | sink9 |
Micro-Up | | | | 420 VLSI2 | NA |
| Clean | sinkcmp | Micro-Up | |
| | | NA |
| Clean | sinkplate |
Micro-Up | | | | 432D | NA |
| Clean | srdsink5 | Micro-Up | |
| | | |
| Clean | srdsink6 | Micro-Up | |
| | | |
| Clean | srdsink8 | Micro-Up | |
| | | |