Step 55.
Metal 2 litho
|
Step |
Process |
Date |
Operator |
|
55.1 |
ASML: mask: Metal2, 21mJ, -0.4um focus Hard bake: UVBAKE Note: ASML PM marks were not detectable. They had to be cleared before the litho step: expose the die above the PM marks followed by Al wet etch |
03/31/05 |
Horvath |