Process [#]

(PROCESS NAME)

Process Summary

Describe in a few lines the basic goal and methods of the process. Generic information will be included here as well.

Material Controls & Compatibility

This section describes acceptable materials for substrates, gases and other objects used in the process.

This section should also include all boundary conditions for a given process window (Thermal budget, materials conflicts, etc.)

Applicable Documents

List related documents and manuals.

Definitions & Process Terminology

Include terminology and the definition of words specific to this manual.

Safety

Any critical reminders of the process’s safe and proper execution can be included here

Process Data

Any data collected to verify process functionality

Process Explanation

Basic explanation of process theory, or references to readily available references on said process theory.

Discuss key variables and call out critical steps

Process Procedure

Clearly and concisely list the operation steps in the order they are carried out. A short, one line description may precede the steps headings. Longer descriptions should be covered in Process Explanation. Each section will be numbered sequentially.

Troubleshooting Guidelines

Include useful information that a reader can use to attempt to resolve issues before requesting process assistance

Figures & Schematics

Figures such as images of “good” and “bad” runs should be placed here. Process flow charts are especially useful.

Appendices

Miscellaneous information that does not fit into above categories should be placed here.

(PROCESS NAME)

Name	____________________	Office	_________________	Date	________________

Campus Phone _____________________ Home Phone _____________________

Login _____________________________	Trainer _______________________

Oral Qualification Checklist

Use this list as a study guide and checklist for superusers running oral qualifications