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Marvell NanoLab News & Events
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Marvell NanoLab News & Events
Contact 510-642-2716, or 510-809- http://nanolab.berkeley.edu

Marvell NanoLab Open for Research October 26, 2009
On Monday October 26, 2009, the Marvell Nanofabrication Laboratory officially opened for labmember research! The Crestec ebeam writer has been started up, qualified and released for lab member use. Crestec is available for reservations through the recently released MercuryWeb software. Marvell NanoLab Orientation Classes are underway. This orientation covers basic safety requirements and laboratory information; members must complete the class before entering the laboratory. At this time, registration announcements are being sent only to members qualified on tools already moved or about to move into the Marvell NanoLab.
 — Bill Flounders, Manager, Marvell NanoLab

Lab Telephone System—Installed and Ready September 11, 2009
The Marvell Laboratory purchased a separate phone system to handle the more than 50 phone lines which serve the laboratory portion of the building. This system is independent of the campus phone system and saves the laboratory significant recurring monthly campus phone charges. The investment will pay for itself in less than two years. Phone installation is complete and new lab phone numbers will be posted September 14. Most Microlab employees will remain in Cory Hall for several more months but some staff can now relocate into the new lab office space.
 — Phill Guillory, NanoLab Projects Manager

Mercury v1.0—The New Wave of the Wand August 24, 2009
Mercury v1.0, our custom lab database system that is the successor to the Microlab's Wand software, was released last week for use in the NanoLab. Designed utilizing 25 years of Microlab operations experience, Mercury will provide researchers and staff with powerful GUI tools to insert and analyze operational data. The Microlab will continue to use the existing Wand.
— Todd Merport, NanoLab Computer Systems Manager   

New Heatpulse RTP Tool August 14, 2009
The Marvell Nanolab obtained its first 200mm-capable thermal processing tool, which will enable uninterrupted RTP access while the Microlab's Heatpulse systems are deinstalled and moved. This benchtop tool was built by AllWin21, the exclusive licensee of Heatpulse RTP designs.
First Tool Move to be Crestec Lithography August 7, 2009
The first tool to be relocated from the old to the new lab will be the Crestec ebeam lithography system. Lab researchers will receive at least four weeks notice prior to tool shutdown and movement. Crestec engineers will support this move to ensure a smooth and rapid restart.


Lam1 is Retired August 7, 2009
The first tool was decommissioned from the Microlab last week, though it will not be moved to the new lab. Lam1, an Autoetch490 that was originally Lam Tool Serial #003 and has served the Microlab since 1984, was officially retired. This tool was sold to an equipment manufacturer as a development tool for after-market Lam control-panel upgrades.


New Wet-Processing Sinks Arrive July 31, 2009
During July, we received our first batch of new sinks from WAFAB International. Though some of the existing lab sinks will move, the new sinks provide redundancy for critical wet processing, and ensure uninterrupted access to research processes such as manual-resist spinning and resist stripping.


Epitaxial Silicon-Germanium System Received — Thank You Applied Materials July 31, 2009
Thanks to Applied Materials for the major donation of an epitaxial silicon-germanium deposition system. Though complete installation will take several months, utility preparation is already underway.




Cleanroom Certification for Marvell NanoLab June 1, 2009
The Marvell NanoLab passed the particle count certification - with flying colors. Class 100 area certified with 0-12 particles >= 0.3 micrometer diameter (avg ~ 5 particles). Class 1000 area certified with 10-350 particles >= 0.3 micrometer diameter (avg ~ 120 particles). With this final contractor requirement complete, the Marvell Lab transition team can now modify utility systems to enable equipment connections. It's time to generate some dust in our new clean room!
Sutardja Dai Hall Fire Alarm System Approved May 27, 2009
The campus Fire Marshall signed off on the new building fire-alarm system and the building went live at 5:24pm today. Because the fire-alarm panel is now monitored by UC Police, the building can be opened to the public and building occupancy can begin. Most important for us, the Marvell Lab transition team can now prepare the lab to receive equipment.
A. Richard Newton Bridge Dedicated May 18, 2009
The suspended pedestrian bridge between the new Sutardja Dai Hall and Cory Hall was dedicated to the memory of former Dean A. Richard Newton. The stairway below the bridge is once again open, allowing access to campus between Cory and Sutardja Dai Halls from the Hearst Street near LeRoy. Photos and video of the bridge installation.

Marvell NanoLab in the News May 5, 2009
Marvell Technology Group Founder and Vice President Weili Dai held a publicity briefing at Sutardja-Dai Hall for several news organizations today, with articles by VentureBeat and Reuters. We're not in the new lab yet - but we are already in the news!
N2 Supply Project Completed for Cory, Hearst Mining, and Marvell Lab April 24, 2009
A new set of high-capacity liquid nitrogen (LN2) vaporizers were installed at Cory Hall this month. These systems convert bulk liquid nitrogen (LN2) to gaseous nitrogen (N2) for Cory Hall, the Hearst Mining Building and the new Marvell NanoLab. The work was completed without interrupting N2 service to the building laboratories. This installation adds flexibility and reliability to the N2 supply system and remediates a long-standing issue with undersized vaporizer capacity.
First Tool Delivered to New Lab - Thank You LAM Research April 24, 2009
The first tool for the Marvell NanoLab was delivered today and accepted at the new building shipping and receiving. The tool is a metal plasma etcher donated by Lam Research Corporation. The complex delivery of this large piece of equipment went without a hitch.


Sutardja Dai Hall and CITRIS Dedication February 27, 2009
Marvell Lab Director Dr. William Flounders (left) and Former California Governor Gray Davis suit up to tour the clean rooms in the new Marvell Nanofabrication Lab facilities. Gov. Davis was responsible for the funds that enabled construction of the new laboratory and CITRIS - one of four California Institutes of Science and Innovation.

CITRIS Dedication story and pictures
CITRIS dedication speeches and ribbon cutting (You Tube videos)


Marvell Lab from the Ground Up
Construction photos and history
The Marvell Lab Story
Five-minute video