1.0 General Information & Processing
1.1 Chemical Hygiene Plan
2.0 Cleaning Procedures
3.0 Mask Making
4.0 Photolithography
5.0 Diffusion Furnaces & Ovens
6.0 Thin Film Systems
6.31 (iondep) Ion Beam Deposition System (4” and 6”)
6.22 (parylene) Parylene Deposition System 2010 Labcoter 2 (4” and 6”)
7.0 Etching Systems
8.0 Testing & Inspection Equipment
8.44 (xdif) Siemens D5000 X-Ray Diffractometer
9.0 Packaging
10.0 Planarization